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Title: Measurement of effective electron mass in biaxial tensile strained silicon on insulator

Autors: Feste SF, Schapers T, Buca D, Zhao QT, Knoch J, Bouhassoune M, Schindlmayr A, Mantl S
THEME: Device physics, modelling and simulation

Publication: APPLIED PHYSICS LETTERS
YEAR: 2009     MONTH: NOV
ISI Document Solution number: 518CD 10.1063/1.3254330

ABSTRACT:

We present measurements of the effective electron mass in biaxial tensile strained silicon on insulator (SSOI) material with 1.2 GPa stress and in unstrained SOI. Hall-bar metal oxide semiconductor field effect transistors on 60 nm SSOI and SOI were fabricated and Shubnikov-de Haas oscillations in the temperature range of T=0.4-4 K for magnetic fields of B=0-10 T were measured. The effective electron mass in SSOI and SOI samples was determined as m(t)=(0.20 +/- 0.01)m(0). This result is in excellent agreement with first-principles calculations of the effective electron mass in the presence of strain.


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